Compact Supercritical Dryer
For Preventing pattern collapse
A pattern collapses when liquid surrounding the pattern in various fabrication processes dries up.
Supercritical drying can prevent the pattern collapse.
Benefits / Features
Novel supercritical process
- The new solvent; non-flammable, and low-toxic fluorocarbon liquid (HFE), which is different from conventional high-pressure CO2 gas, is used as a supercritical material.
- Critical pressure of HFE is about one-third of that of CO2. It enables the downsizing of system.
- High zeta potential of HFE avoids particle adhesion.
- Process is started by only pushing a start button after filling the chamber with HFE.
- No additional high-pressure gas cylinder is necessary.
- The footprint is less than 1m2 , e.g., for laboratory use.
- Simple device configuration enables customers to design the chamber with a various size.
- High safety is maintained by a door lock system, an overheat protector, safety valves for overpressure, etc.
Specifications / Details
For laboratory use
typical process pressure : 2.6 MPa
typical process temperature : 473 K
chamber capacity : around 60 cc
overall size : W 500 x D 400 x H 470 mm
The effect of supercritical HFE drying
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