XUV filters
XUV filters
Image of XUV filters

Premium XUV filters with high transmittance and long lifetime

Benefits

NTT-AT's extreme ultraviolet (XUV or EUV) filters realize high-transmittance, high-stability, and long-lifetime for varius XUV experiments. This premium quality filters are pinholeless, without support mesh and support film, and having oxidation protective coatings. 
Premium free-standing XUV filters provided by NTT-AT is realizes high transmittance and long lifetime by coating oxidation protective layers on both sides of the metal thin film.
NTT-AT's extreme ultraviolet (XUV or EUV) filters realize high-transmittance, high-stability, and long-lifetime for varius XUV experiments. This premium quality filters are pinholeless, without support mesh and support film, and having oxidation protective coatings.

Features

Standard specfications:
Filter size: 10 mm * 10mm
Filter thickness: 100 nm
Holder size: diameter 28 mm
List of filters:
  • Zr (for wavelength 10 – 20 nm)
  • Al (for wavelength 20 – 50 nm)
  • Sn/SiN (for wavelength 3 – 5 nm)
  • In/SiN (for wavelength 3 – 5 nm)
 The size, thickness, etc., will be customized upon request.

Example(Filter thickness: 100 nm)  

In our demonstration, NTT-AT's oxide protected Al XUV filter has 2 to 5 times higher transmittance than that of conventional Al filter, at 3 months after fabrication. This XUV filters will be stably used for a long time owing to the effect of the oxidation protective coatings.

XUV filter01
XUV filter02
XUV filter03NTT-AT's oxide protected Al XUV filter

XUV filters Inquiry

Past record

NTT-AT's XUV/EUV filters feature outstanding high transmittance and transmitted beam quality because of no-mesh and no-support materials. Furthermore, due to the long time stability, this filter has been installed into many experimental environments that require long-time irradiation.

Publication list (including co-authored papers):

Masatoshi Hatayama, Hisataka Takenaka, Eric M. Gullikson, Akira Suda and Katsumi Midorikawa, “High-Transmittance Free-Standing Aluminum Extreme Ultraviolet Filter,” Jpn. J. Appl. Phys. 48 122202 (2009); http://dx.doi.org/10.1143/JJAP.48.122202
Masatoshi Hatayama, Eiji J. Takahashi, Hisataka Takenaka, Eric M. Gullikson and Katsumi Midorikawa, “High-throughput beam splitters for high-order harmonics in soft-x-ray region,” Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770T (2011); http://dx.doi.org/10.1117/12.887561
 

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