MEMS Accelerometer Device with An Ultra-Low Noise of 300 nG/√Hz Is Realized.
Innovative structure,*1 capacitive sensor using a multi-layer gold proof-mass, tremendously suppresses the noises of the whole device.*2*1 T. Konishi et al., Jpn. J. Appl. Phys., Vol. 52, No. 6S, 06GL04 (2013).
*2 D. Yamane et al., App. Phys. Letters, Vol. 104, Issue 7, 074102 (2014).
Sensor Chip's technical information is shown below. We also provide sensor modules and packages on customers' requests.
- Detection range: +/-0.5G, +/-2G, +/-4G, +/-16G
- MEMS sensor device chip size: < 4 mm x 4 mm x 0.6 mm
- MEMS sensor device noise density: < 300 nG/√Hz
To be applied to
- Medical: Human body motion monitoring
- Factories/plants/transportations: Oscillation monitoring of plants and machines for early failure detections
- Infrastructures: Critical structures like bridges, tunnels and railroads
- Aerospace: Satellites, airplanes, and others