SiC membrane, SiN membrane
SiC membrane, SiN membrane

The standard sample holder for X-ray analysis and electron beam analysis.

SiC membrane, SiN membrane Inquiry

Benefits

Only NTT-AT provides SiC membrane. This SiC polycrystalline membrane has a high durability for pressure, x-ray irradiation, and electron beam irradiation compared with the conventional SiN membranes.

Customization is available for applications such as;
(i) metal thin film formation on membrane for use as a thin film target or a beam splitter,
(ii) electrode formation on membrane for use as a thin film heater or a chemcal sample holder,
(iii) a cell-type membrane for use as an X-ray CT sample holder,
(iv) sub-50 nm thickness membrane for use in electron spectroscopy, and electron microscopy,
(v) multiple window membranes, large/small membranes.

Features

NTT-AT offers SiN membranes and SiC membranes for x-ray and electron analysis;
Standard  as well as customized specfications are available.


     

Application:

Sample holder for x-ray, electron, EUV analysis
Liquid cell window for chemical and biological analysis
Vacuum window
Support material for transmission x-ray optics

  
                                                                                                    
Membrane material SiC, SiN (insulating)
*Typical resistivity of 100 nm-thick SiC membrane is 2-3 M ohm.
Base plate material 4 inch Si (can be diced out to the required size)
Membrane thickness several 100 nm ~ severel μm
*Large quantity as well as small quantity orders are welcome, please feel free to contact us anytime.
Schematic of membrane chipSchematic of membrane chip
* Please note that the specifications may be subject to change without notice.



Papers &Publications

Link page

 

SiC membrane, SiN membrane Inquiry

 

 

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