SiC membrane, SiN membrane
SiC membrane, SiN membrane

The standard sample holder for X-ray analysis and electron beam analysis.


Only NTT-AT provides SiC membrane. This SiC polycrystalline membrane has a high durability for pressure, x-ray irradiation, and electron beam irradiation compared with the conventional SiN membranes.
Customization is available for applications such as;
(i) metal thin film formation on membrane for use as a thin film target or a beam splitter,
(ii) electrode formation on membrane for use as a thin film heater or a chemcal sample holder,
(iii) a cell-type membrane for use as an X-ray CT sample holder,
(iv) sub-50 nm thickness membrane for use in electron spectroscopy, and electron microscopy,
(v) multiple window membranes, large/small membranes.


Several standard types and customized types are available for use in your setup.

membrane_01 membrane_02
SiN membrane


Model Chip Size(mm) Membrane Material Membrane Thickness(nm) Membrane Size(mm) Frame Thickness(mm)
SiN membrane
MEM-N03001/7.5M 7.5 × 7.5 SiN 100 3 × 3 0.625
MEM-N02001/10M 10 × 10 SiN 100 2 × 2 0.625
MEM-N03002/7.5M 7.5 × 7.5 SiN 200 3 × 3 0.625
MEM-N03002/10M 10 × 10 SiN 200 3 × 3 0.625
MEM-N020027/10M 10 × 10 SiN 270 2 × 2 0.625
MEM-N0302/10M 10 × 10 SiN 2,000 3 × 3 0.625
MEM-N0301/10M 10 × 10 SiN 1,000 3 × 3 0.625
SiC membrane
MEM-C03003/10M 10 × 10 SiC 300 3 × 3 0.625
MEM-C0301/10M 10 × 10 SiC 1,000 3 × 3 0.625
Membrane material SiC, SiN (insulating)
*Typical resistivity of 100 nm-thick SiC membrane is 2-3 M ohm.
Base plate material 3 inch or 4 inch Si (can be diced out to the required size)
Membrane thickness several 100 nm ~ severel μm
Membrane stress Able to control stress according to your requirements
*Large quantity as well as small quantity orders are welcome, please feel free to contact us anytime.
Schematic of membrane chipSchematic of membrane chip
* Please note that the specifications may be subject to change without notice.

SiC membrane, SiN membrane Inquiry

Past record

Since 2014, we have developed and started to sell the "membrane cell" for X-ray micro CT analysis sample holders. This makes it possible to easily obtain CT images from 10 μm class samples.

Figure: SiN membrane cell used for X-ray micro CT
Pressure durable SiC membrane and SiN membrane are provided for use as windows in vacuum chambers. By using these membranes, low energy X-rays, which usually cannot pass through a glass window, can exit the vacuum chamber.

Figure: Highly durable membranes used for a thin vacuum window.

NTT-AT SiC membrane and SiN membrane have been  used by researchers and developers in physics, chemistry, biology and material technology fields.

Paper lists

O. Fuchs, M. Zharnikov, L. Weinhardt, M. Blum, M. Weigand, Y. Zubavichus, M. Bär, F. Maier, J. D. Denlinger, C. Heske, M. Grunze, and E. Umbach, “Isotope and Temperature Effects in Liquid Water Probed by X-Ray Absorption and Resonant X-Ray Emission Spectroscopy,” Phys. Rev. Lett. 100, 027801 (2008);
Yudai Izumi, Maiko Tanabe, Akiko Imazu, Aki Mimoto, Masahito Tanaka, Akane Agui, Takayuki Muro and Kazumichi Nakagawa, “Characteristic oxygen K-edge circular dichroism spectra of amino acid films by improved measurement technique,” J. Chem. Phys. 138, 074305 (2013);
Takashi Tokushima,Yuka Horikawa, Osamu Takahashi, Hidemi Arai,b Koichiro Sadakane, Yoshihisa Harada, Yasutaka Takata and Shik Shin, “Solvation dependence of valence electronic states of water diluted in organic solvents probed by soft X-ray spectroscopy,” Phys. Chem. Chem. Phys. 16, 10753 (2014);
Nozomu Ishiguro, Tomoya Uruga, Oki Sekizawa, Takuya Tsuji, Motohiro Suzuki, Naomi Kawamura, Masaichiro Mizumaki, Kiyofumi Nitta, Toshihiko Yokoyama and Mizuki Tada,“Visualization of the Heterogeneity of Cerium Oxidation States in Single Pt/Ce2Zr2Ox Catalyst Particles by Nano-XAFS,” ChemPhysChem 15, 1563 (2014);
W. S. Drisdell and J. B. Kortright, “Gas cell for in situ soft X-ray transmission-absorption spectroscopy of materials,” Rev. Sci. Instrum. 85, 074103 (2014);
Masaaki Yoshida, Yosuke Mitsutomi, Takehiro Mineo, Masanari Nagasaka, Hayato Yuzawa, Nobuhiro Kosugi, and Hiroshi Kondoh, “Direct Observation of Active Nickel Oxide Cluster in Nickel–Borate Electrocatalyst for Water Oxidation by In Situ O K-Edge X-ray Absorption Spectroscopy,” J. Phys. Chem. C 119, 19279 (2015);
S. Matsuyama, M. Shimura, M. Fujii, K. Maeshima, H. Yumoto, H. Mimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, Y. Ishizaka, T. Ishikawa and K. Yamauchi, “Elemental mapping of frozen-hydrated cells with cryo-scanning X-ray fluorescence microscopy,” X-Ray Spectrom. 39, 260 (2010);
Eika Tsunemi, Yoshio Watanabe, Hiroshi Oji, Yi-Tao Cui Jin-Young Son and Atsushi Nakajima, “Hard x-ray photoelectron spectroscopy using an environmental cell with silicon nitride membrane windows,” J. Appl. Phys. 117, 234902 (2015);

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