SiC membrane, SiN membrane
The standard sample holder for X-ray analysis and electron beam analysis.
SiC membrane, SiN membrane Inquiry
Benefits
Only NTT-AT provides SiC membrane. This SiC polycrystalline membrane has a high durability for pressure, x-ray irradiation, and electron beam irradiation compared with the conventional SiN membranes.
Customization is available for applications such as;
(i) metal thin film formation on membrane for use as a thin film target or a beam splitter,
(ii) electrode formation on membrane for use as a thin film heater or a chemcal sample holder,
(iii) a cell-type membrane for use as an X-ray CT sample holder,
(iv) sub-50 nm thickness membrane for use in electron spectroscopy, and electron microscopy,
(v) multiple window membranes, large/small membranes.
Features
NTT-AT offers SiN membranes and SiC membranes for x-ray and electron analysis;Standard as well as customized specfications are available.
Application:
–Sample holder for x-ray, electron, EUV analysis
–Liquid cell window for chemical and biological analysis
–Vacuum window
–Support material for transmission x-ray optics
Membrane material |
SiC, SiN (insulating) *Typical resistivity of 100 nm-thick SiC membrane is 2-3 M ohm. |
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Base plate material | 4 inch Si (can be diced out to the required size) |
Membrane thickness | several 100 nm ~ severel μm |
Schematic of membrane chip
* Please note that the specifications may be subject to change without notice.
* Please note that the specifications may be subject to change without notice.