EUV mirrors/X-ray mirrors > Multilayer Designs
Multilayer Designs
NTT Advanced Technology have been developing and supplying XUV multilayer mirrors (MLMs) from mid 1990’s. Since, the products are used in several fields such as astronomy, XUV photoelectron spectroscopy, XUV microscopy, EUV lithography, plasma physics, and attosecond-science.
 
For high-quality MLM fabrications, no only fabrication techniques but also optical design know-how is necessary. We have been supplying a lot of kinds of MLMs in XUV region, corresponding to the customers' requirements, such as a high reflectivity, a broad bandwidth, a narrow bandwidth, and a high contrast. High thermal tolerance MLMs and high damage threshold MLMs have also been supplied.
 
Please kindly find the detail information of our XUV MLMs for suitable for your experiments. and contact us. We will also provide custom design MLMs.
 

Multilayer Designs Inquiry


XUV MLM Catalog 836KB

Design List

No design name AOI pol. peak energy reflectivity bandwidth (FWHM)
1 HR-98-3.4 5 deg s 98 eV  (12.7 nm) 67.7% 3.4 eV  (0.4 nm)
2 HR-95-3.8 5 deg s 95 eV  (13.1 nm) 67.7% 3.8 eV  (0.5 nm)
3 HR-90-3.8 5 deg s 90 eV  (13.8 nm) 68.0% 3.8 eV  (0.6 nm)
4 HR-85-4.0 5 deg s 85 eV  (14.6 nm) 66.8% 4.0 eV  (0.7 nm)
5 HR-80-4.0 5 deg s 80 eV  (15.5 nm) 63.3% 4.0 eV  (0.8 nm)
6 HR-75-4.6 5 deg s 75 eV  (16.5 nm) 54.5% 4.6 eV  (1.0 nm)
7 HR-70-2.6 5 deg s 70 eV  (17.7 nm) 52.1% 2.6 eV  (0.7 nm)
8 HR-65-2.6 5 deg s 65 eV  (19.1 nm) 48.5% 2.6 eV  (0.8 nm)
9 HR-60-2.8 5 deg s 60 eV  (20.7 nm) 43.7% 2.8 eV  (1.0 nm)
10 HR-55-3.6 5 deg s 55 eV  (22.5 nm) 37.3% 3.6 eV  (1.5 nm)
11 HR-50-4.2 5 deg s 50 eV  (24.8 nm) 30.9% 4.2 eV  (2.1 nm)
12 HR-48-2.0 5 deg s 48 eV  (25.8 nm) 50.6% 2.0 eV  (1.1 nm)
13 HR-45-2.4 5 deg s 45 eV  (27.6 nm) 48.4% 2.4 eV  (1.4 nm)
14 HR-40-2.6 5 deg s 40 eV  (31.0 nm) 44.8% 2.6 eV  (2.0 nm)
15 HR-35-2.6 5 deg s 35 eV  (35.4 nm) 43.1% 2.6 eV  (2.6 nm)
16 HR-30-3.0 5 deg s 30 eV  (41.3 nm) 41.2% 3.0 eV  (4.1 nm)
17 HR45-90-6.0 45 deg s 90 eV  (13.1 nm) 66.1% 6.0 eV  (0.9 nm)
18 HR45-80-7.4 45 deg s 80 eV  (15.5 nm) 60.0% 7.4 eV  (1.4 nm)
19 HR45-70-36.0 45 deg s 70 eV  (17.7 nm) 49.0% 3.6 eV  (0.9 nm)
20 HR45-60-5.4 45 deg s 60 eV  (20.7 nm) 40.8% 5.4 eV  (1.8 nm)
21 HR45-50-10.0 45 deg s 50 eV  (24.8 nm) 30.0% 10.0 eV  (5.1 nm)
22 HR45-40-5.0 45 deg s 40 eV  (31.0 nm) 44.4% 5.0 eV  (3.8 nm)
23 HR45-30-7.0 45 deg s 30 eV  (41.3 nm) 42.5% 7.0 eV  (9.3 nm)
24 NBR-98-2.3 5 deg s 98 eV  (12.7 nm) 39.5% 2.3 eV  (0.3 nm)
25 NBR-95-2.6 5 deg s 95 eV  (13.1 nm) 40.7% 2.6 eV  (0.4 nm)
26 NBR-90-2.5 5 deg s 90 eV  (13.8 nm) 44.5% 2.5 eV  (0.4 nm)
27 NBR-85-2.5 5 deg s 85 eV  (14.6 nm) 48.5% 2.5 eV  (0.4 nm)
28 NBR-80-2.5 5 deg s 80 eV  (15.5 nm) 50.1% 2.5 eV  (0.5 nm)
29 NBR-75-2.6 5 deg s 75 eV  (16.5 nm) 46.0% 2.6 eV  (0.6 nm)
30 NBR-70-1.9 5 deg s 70 eV  (17.7 nm) 43.7% 1.9 eV  (0.5 nm)
31 NBR-65-2.1 5 deg s 65 eV  (19.1 nm) 43.5% 2.1 eV  (0.6 nm)
32 NBR-60-2.2 5 deg s 60 eV  (20.7 nm) 42.2% 2.2 eV  (0.8 nm)
33 NBR-55-2.2 5 deg s 55 eV  (22.5 nm) 38.4% 2.2 eV  (1.0 nm)
34 NBR-50-2.7 5 deg s 50 eV  (24.8 nm) 33.5% 2.7 eV  (1.3 nm)
35 NBR-48-1.3 5 deg s 48 eV  (25.8 nm) 49.2% 1.3 eV  (0.7 nm)
36 NBR-45-1.5 5 deg s 45 eV  (27.6 nm) 47.6% 1.5 eV  (0.9 nm)
37 NBR-40-1.5 5 deg s 40 eV  (31.0 nm) 44.8% 1.5 eV  (1.1 nm)
38 NBR-35-1.6 5 deg s 35 eV  (35.4 nm) 43.7% 1.6 eV  (1.6 nm)
39 NBR-30-1.9 5 deg s 30 eV  (41.3 nm) 42.0% 1.9 eV  (2.6 nm)
40 NBR45-90-3.1 45 feg s 90 eV  (12.7 nm) 53.2% 3.1 eV  (0.5 nm)
41 NBR45-70-2.6 45 feg s 70 eV  (17.7 nm) 45.6% 2.6 eV  (0.7 nm)
42 NBR45-40-2.9 45 feg s 40 eV  (31.0 nm) 46.5% 2.9 eV  (2.2 nm)
43 BBR-80-30 5 deg s 80 eV  (15.5 nm) 5.1% 30 eV  (6.1 nm)
44 BBR-70-27 5 deg s 70 eV  (17.7 nm) 8.1% 27 eV  (7.3 nm)
45 BBR-60-24 5 deg s 60 eV  (20.7 nm) 9.8% 24 eV  (8.6 nm)
46 UBBR-55-39 5 deg s 55 eV  (22.5 nm) 6.8% 39 eV  (16.3 nm)
47 UBBR-50-34 5 deg s 50 eV  (24.8 nm) 6.7% 34 eV  (18.6 nm)
XUV MLM Catalog 836KB

 

HR-98-3.4

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-98-3.4
AOI 5 deg
polarization s
peak energy 98 eV (12.7 nm)
peak reflectivity 67.7%
bandwidth (FWHM) 3.4 eV (0.4 nm)

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HR-95-3.8

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-95-3.8
AOI 5 deg
polarization s
peak energy 95 eV (13.1 nm)
peak reflectivity 67.7%
bandwidth (FWHM) 3.8 eV (0.5 nm)

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HR-90-3.8

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-90-3.8
AOI 5 deg
polarization s
peak energy 90 eV (13.8 nm)
peak reflectivity 68.0%
bandwidth (FWHM) 3.8 eV (0.6 nm)

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HR-85-4.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-85-4.0
AOI 5 deg
polarization s
peak energy 85 eV (14.6 nm)
peak reflectivity 66.8%
bandwidth (FWHM) 4.0 eV (0.7 nm)

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HR-80-4.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-80-4.0
AOI 5 deg
polarization s
peak energy 80 eV (15.5 nm)
peak reflectivity 63.3%
bandwidth (FWHM) 4.0 eV (0.8 nm)

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HR-75-4.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-75-4.6
AOI 5 deg
polarization s
peak energy 75 eV (16.5 nm)
peak reflectivity 54.5%
bandwidth (FWHM) 4.6 eV (1.0 nm)

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HR-70-2.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-70-2.6
AOI 5 deg
polarization s
peak energy 70 eV (17.7 nm)
peak reflectivity 52.1%
bandwidth (FWHM) 2.6 eV (0.7 nm)

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HR-65-2.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-65-2.6
AOI 5 deg
polarization s
peak energy 65 eV (19.1 nm)
peak reflectivity 48.5%
bandwidth (FWHM) 2.6 eV (0.8 nm)

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HR-60-2.8

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-60-2.8
AOI 5 deg
polarization s
peak energy 60 eV (20.7 nm)
peak reflectivity 43.7%
bandwidth (FWHM) 2.8 eV (1.0 nm)

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HR-55-3.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-55-3.6
AOI 5 deg
polarization s
peak energy 55 eV (22.5 nm)
peak reflectivity 37.3%
bandwidth (FWHM) 3.6 eV (1.5 nm)

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HR-50-4.2

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-50-4.2
AOI 5 deg
polarization s
peak energy 50 eV (24.8 nm)
peak reflectivity 30.9%
bandwidth (FWHM) 4.2 eV (2.1 nm)

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HR-48-2.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-48-2.0
AOI 5 deg
polarization s
peak energy 48 eV (25.8 nm)
peak reflectivity 50.6%
bandwidth (FWHM) 2.0 eV (1.1 nm)

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HR-45-2.4

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-45-2.4
AOI 5 deg
polarization s
peak energy 45 eV (27.6 nm)
peak reflectivity 48.4%
bandwidth (FWHM) 2.4 eV (1.4 nm)

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HR-40-2.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-40-2.6
AOI 5 deg
polarization s
peak energy 40 eV (31 nm)
peak reflectivity 44.8%
bandwidth (FWHM) 2.6 eV (2.0 nm)

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HR-35-2.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-35-2.6
AOI 5 deg
polarization s
peak energy 35 eV (35.4 nm)
peak reflectivity 43.1%
bandwidth (FWHM) 2.6 eV (2.6 nm)

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HR-30-3.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR-30-3.0
AOI 5 deg
polarization s
peak energy 30 eV (41.3 nm)
peak reflectivity 41.2%
bandwidth (FWHM) 3.0 eV (4.1 nm)

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HR45-90-6.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR45-90-6.0
AOI 45 deg
polarization s
peak energy 90 eV (13.8 nm)
peak reflectivity 66.1%
bandwidth (FWHM) 6.0 eV (0.9 nm)

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HR45-80-7.4

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR45-80-7.4
AOI 45 deg
polarization s
peak energy 80 eV (15.5 nm)
peak reflectivity 60.0%
bandwidth (FWHM) 7.4 eV (1.4 nm)

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HR45-70-36.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR45-70-3.6
AOI 45 deg
polarization s
peak energy 70 eV (17.7 nm)
peak reflectivity 49.0%
bandwidth (FWHM) 3.6 eV (0.9 nm)

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HR45-60-5.4

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR45-60-5.4
AOI 45 deg
polarization s
peak energy 60 eV (20.7 nm)
peak reflectivity 40.8%
bandwidth (FWHM) 5.4 eV (1.8 nm)

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HR45-50-10.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR45-50-10.0
AOI 45 deg
polarization s
peak energy 50 eV (24.8 nm)
peak reflectivity 30.0%
bandwidth (FWHM) 10.0 eV (5.1 nm)

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HR45-40-5.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR45-40-5.0
AOI 45 deg
polarization s
peak energy 40 eV (31 nm)
peak reflectivity 44.4%
bandwidth (FWHM) 5.0 eV (3.8 nm)

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HR45-30-7.0

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name HR45-30-7.0
AOI 45 deg
polarization s
peak energy 30 eV (41.3 nm)
peak reflectivity 42.5%
bandwidth (FWHM) 7.0 eV (9.3 nm)

NBR-98-2.3

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-98-2.3
AOI 5 deg
polarization s
peak energy 98 eV (12.7 nm)
peak reflectivity 39.5%
bandwidth (FWHM) 2.3 eV (0.3 nm)

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NBR-95-2.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-95-2.6
AOI 5 deg
polarization s
peak energy 95 eV (13.1 nm)
peak reflectivity 40.7%
bandwidth (FWHM) 2.6 eV (0.4 nm)

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NBR-90-2.5

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-90-2.5
AOI 5 deg
polarization s
peak energy 90 eV (13.8 nm)
peak reflectivity 44.5%
bandwidth (FWHM) 2.5 eV (0.4 nm)

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NBR-85-2.5

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-85-2.5
AOI 5 deg
polarization s
peak energy 85 eV (14.6 nm)
peak reflectivity 48.5%
bandwidth (FWHM) 2.5 eV (0.4 nm)

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NBR-80-2.5

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-80-2.5
AOI 5 deg
polarization s
peak energy 80 eV (15.5 nm)
peak reflectivity 50.1%
bandwidth (FWHM) 2.5 eV (0.5 nm)

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NBR-75-2.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-75-2.6
AOI 5 deg
polarization s
peak energy 75 eV (16.5 nm)
peak reflectivity 46.0%
bandwidth (FWHM) 2.6 eV (0.6 nm)

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NBR-70-1.9

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-70-1.9
AOI 5 deg
polarization s
peak energy 70 eV (17.7 nm)
peak reflectivity 43.7%
bandwidth (FWHM) 1.9 eV (0.5 nm)

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NBR-65-2.1

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-65-2.1
AOI 5 deg
polarization s
peak energy 65 eV (19.1 nm)
peak reflectivity 43.5%
bandwidth (FWHM) 2.1 eV (0.6 nm)

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NBR-60-2.2

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-60-2.2
AOI 5 deg
polarization s
peak energy 60 eV (20.7 nm)
peak reflectivity 42.2%
bandwidth (FWHM) 2.2 eV (0.8 nm)

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NBR-55-2.2

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-55-2.4
AOI 5 deg
polarization s
peak energy 55 eV (22.5 nm)
peak reflectivity 38.4%
bandwidth (FWHM) 2.4 eV (1 nm)

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NBR-50-2.7

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-50-2.7
AOI 5 deg
polarization s
peak energy 50 eV (24.8 nm)
peak reflectivity 33.5%
bandwidth (FWHM) 2.7 eV (1.3 nm)

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NBR-48-1.3

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-48-1.3
AOI 5 deg
polarization s
peak energy 48 eV (25.8 nm)
peak reflectivity 49.2%
bandwidth (FWHM) 1.3 eV (0.7 nm)

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NBR-45-1.5

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-45-1.5
AOI 5 deg
polarization s
peak energy 45 eV (27.6 nm)
peak reflectivity 47.6%
bandwidth (FWHM) 1.5 eV (0.9 nm)

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NBR-40-1.5

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-40-1.5
AOI 5 deg
polarization s
peak energy 40 eV (31 nm)
peak reflectivity 44.8%
bandwidth (FWHM) 1.5 eV (1.1 nm)

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NBR-35-1.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB-35-1.6
AOI 5 deg
polarization s
peak energy 35 eV (35.4 nm)
peak reflectivity 43.7%
bandwidth (FWHM) 1.6 eV (1.6 nm)

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NBR-30-1.9

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR-30-1.9
AOI 5 deg
polarization s
peak energy 30 eV (41.3 nm)
peak reflectivity 42.0%
bandwidth (FWHM) 1.9 eV (2.6 nm)

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NBR45-90-3.1

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB45-90-3.1
AOI 45 deg
polarization s
peak energy 90 eV (13.8 nm)
peak reflectivity 53.2%
bandwidth (FWHM) 3.1 eV (0.5 nm)

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NBR45-70-2.6

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NNR45-70-2.6
AOI 45 deg
polarization s
peak energy 70 eV (17.7 nm)
peak reflectivity 45.6%
bandwidth (FWHM) 2.6 eV (0.7 nm)

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NBR45-40-2.9

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name NRB45-40-2.9
AOI 45 deg
polarization s
peak energy 40 eV (31 nm)
peak reflectivity 46.5%
bandwidth (FWHM) 2.9 eV (2.2 nm)

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BBR-80-30

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name BBR-80-30
AOI 5 deg
polarization s
peak energy 80 eV (15.5 nm)
peak reflectivity 5.1%
bandwidth (FWHM) 30 eV (6.1 nm)

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BBR-70-27

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name BBR-70-27
AOI 5 deg
polarization s
peak energy 70 eV (17.7 nm)
peak reflectivity 8.1%
bandwidth (FWHM) 27 eV (7.3 nm)

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BBR-60-24

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name BBR-60-24
AOI 5 deg
polarization s
peak energy 60 eV (20.7 nm)
peak reflectivity 9.8%
bandwidth (FWHM) 24 eV (8.6 nm)

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UBBR-55-39


XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name UBBR-55-39
AOI 5 deg
polarization s
peak energy 55 eV (22.5 nm)
peak reflectivity 6.8%
bandwidth (FWHM) 39 eV (16.3 nm)

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UBBR-50-34

XUV multi-layer mirrors(EUV multi-layer mirrors)
Design name UBBR-50-34
AOI 5 deg
polarization s
peak energy 50 eV (24.8 nm)
peak reflectivity 6.7%
bandwidth (FWHM) 34 eV (18.6 nm)

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XUV MLM Catalog 836KB






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