nm-scales for nm-beam size measurement
nm-scales for nm-beam size measurement

Measurement of nm-size beams, such as electron beams, ion beams, and X-rays, is now possible

Benefits / Features

Features

  • Measurement of nm-size beams, such as electron beams, ion beams, and X-rays, is now possible
  • The beam-width can be measured in units of nm.
  • Measurement in both one and two dimensions is possible.
(a) Structure of the scale; and (b) Strength of the electron ray transmitted
  1. Structure of the scale
  2. Strength of the electron ray transmitted
Example of electron beam size measurement
References:
K.Kurihara,K.Iwadate,H.Namatsu,
M.Nagase,H.Takenaka and K.Murase,
"An Electron Beam Nanolithography System and its Application to Si Nanofabrication",
Jpn.J.Appl.Phys.,34(1995)6940


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