Pressure Controllable Automatic Curing System PCOA-01T
Pressure Controllable Automatic Curing System PCOA-01T

Thermal treatment in the mounting process of various devices

Pressure Controllable Automatic Curing System PCOA-01T

A pressure- and- heat- process is started by only pushing a start button after setting samples on a chamber stage.
Rapid heating-up and cooling-down characteristics achieve quick turnaround time (QTAT).

Benefits / Features

Applicable to various fields

  • Thermal treatment in the mounting process of various devices.
  • Removal of bubbles in seal or adhesion resins.
  • Low oxygen cure of resins.
  • Material synthesis under increased pressure.

etc.

High performance for mass production

  • Pressure-resistant gas heater enables rapid heat-up and cooling-down.
  • Several programmable temperature controls and adjustable pressure conditions increase the efficiency of work.
  • The inside dimension of the chamber as large as φ450 mm is allows for large diameter substrates.
  • A signal tower indicates the status of operation.

User-friendly system

  • Touch panel is adopted for simple operation.

Safety devices

Specifications / Details

Specifications

Pressure control range 0.2 ~ 0.8 MPa
Temerature control range room temperature ~ 250 ?
Wafer size 3?4?6?8?12 inch diameter?
(Max. 300 mm square)
Instalation space main body 1.4 m2
N2 circulation gas space 2.3m2
Model number PCOA-01T

Pressure-resistant Gas Heater

Pressure-resistant gas heater system enables quick injection of hot / cool air(or nitrogen) to the chamber.; thus the temperature profile control is attained easily.

Pressure-resistant Gas Heater

Temperture Profile Example

Example of rapid temperature increase / temperature decrease
Example of rapid temperature increase / temperature decrease

Example of temperature step controlled

Temperture Profile Example 1

Example of pressure step controlled

Temperture Profile Example 2

Temperature distribution inside the chamber
Temperture Profile Example 3

Relationship of N2 Gas Circulation System and Pressure Controllable Automatic
Curing System

large size

Documents

Pamphlet

Pressure Controllable Automatic Curing System
    PCOA-01T
3.7MB

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