Standard sample for in-depth profiling
Standard sample for in-depth profiling

NTT-AT's in-depth profiling standard sample is used as the standard sample for calibration, resolution evaluation, and sensitivity evaluation of SIMS, AES, XPS and XRF. This multilayer based ample is used at many analysis instruments manufacturers, analys

The standard test sample with multilayer films for in-depth profiling of SIMS, AES, XPS and XRF. Suitable for evaluation of resolution, distance measurement and sensitivity. The standard sample with your required specifications available.

Cases

Si/BN multilayer standard sample

  • Laminated standard sample for in-depth profiling such as SIMS analysis
  • Not only multilayer films with constant period but also non-periodic period multilayer films are available
  • Ultra thin BN layer (~0.01nm) is also available
TEM cross section example Si/BN multilayer film structure diagram
TEM cross section example Si/BN multilayer film structure diagram
In-depth profiling example (with SIMS) Surface roughness measurement example with AFM
In-depth profiling example (with SIMS) Surface roughness measurement example with AFM

Si/Mo multilayer standard sample

Si/Mo multilayer standard sample Si/Momultilayer film structure diagream
Si/Mo multilayer standard sample Si/Momultilayer film structure diagream
AES measurement AES evaluation example
AES measurement AES evaluation example

Various types of multilayer standard samples

  • Able to provide various types of multilayer standard samples
  • The following diagrams are some examples
TEM cross section and its diagram 1 TEM cross section and its diagram 2
TEM cross section and its diagram

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