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X-ray chart (resolution chart)

Ta absorber patterns (highly precise fine patterns with good processability of...

  • Ta absorber patterns (highly precise fine patterns with good processability of Ta)
  • SiN or SiC membrane
  • Three types of x-ray chart according to needs(Ultra-high resolution type,High resolution type with thicker Ta layer and Standard type)

Detail

NTT-AT's X-ray test chart(custom design) is used for the below publications from Osaka University and Riken.
This paper was published on March 4,2013.

Successful development of an x-ray microscope with high sensitivity and spatial resolution.
-high-resolution and wide-field-of-veiw in biological soft tissues,etc.-

Detail

Specifications

Item Standard type
XRESO-100
High resolution type
with thicker Ta
absorber
XRESO-50HC
NEW!!
Ultra high resolution
XRESO-20
Substrate Material / Size Si 10mm square
Thickness 1mm 1mm 0.625mm
Membrane Material /
Thickness
Ru 20nm
SiN 2µm
Ru 20nm
SiC 200nm
SiN 50nm
Ru 20nm
SiC 200nm
SiN 50nm
Area 1mm square 1mm square 1mm square
Alignment Center of the substrate Center of the substrate Center of the substrate
Pattern Absorber /
Thickness
Ta 1µm Ta 500nm Ta 100nm
Minimum pattern
size
100nm 50nm 20nm
Radial Pattern
Patterned ares 250µm × 350µm 300µm square 300µm square

image1
Schematic of X-ray chart (High resolution chart)

PAGETOP

Ultra high resolution type

XRESO-20


SEM image of chart Pattern layout
100nm hole pattern layout

① Radial Pattern
③④ Hole Pattern
⑤⑥⑦⑧ L&S Pattern
Hole pattern example
50nm L&S
Line and Space  pattern example
20nm patterns 20nm Radial patterns
20nm patterns   20nm radial pettern  

PAGETOP

Standard type

XRESO-100


Pattern layout
image2

PAGETOP

High resolution type with thicker absorber

XRESO-50HC


SEM image of chart Pattern layout
Radial patterns
Corresponding to point (1) of the pattern layout
image13
image11
50nm L&S
Corresponding to point (2) of the pattern layout
image12