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X-ray chart (resolution chart)

Ta absorber patterns (highly precise fine patterns with good processability of...

  • Ta absorber patterns (highly precise fine patterns with good processability of Ta)
  • SiN or SiC membrane
  • Three different types according to your needs

Detail

Specifications

Item Standard type
XRESO-100
High resolution type
with thicker Ta
absorber
XRESO-50HC
NEW!!
Ultra high resolution
XRESO-20
Substrate Material / Size Si 10mm square
Thickness 1mm 1mm 0.625mm
Membrane Material /
Thickness
Ru 20nm
SiN 2µm
Ru 20nm
SiC 200nm
SiN 50nm
Ru 20nm
SiC 200nm
SiN 50nm
Area 1mm square 1mm square 1mm square
Alignment Center of the substrate Center of the substrate Center of the substrate
Pattern Absorber /
Thickness
Ta 1µm Ta 500nm Ta 100nm
Minimum pattern
size
100nm 50nm 20nm
Radial Pattern
Patterned ares 250µm × 350µm 300µm square 300µm square

image1
Schematic of X-ray chart (High resolution chart)

PAGETOP

Ultra high resolution type

XRESO-20


SEM image of chart Pattern layout
100nm hole
Corresponding to point (2)of the pattern layout
pattern layout overview
Hole pattern example
50nm L&S
Corresponding to point (3)of the pattern layout
Line and Space  pattern example
20nm patterns
Corresponding to point (4)of the pattern layout
Radial patterns
Corresponding to point (1)of the pattern layout
20nm patterns radial patterns

PAGETOP

Standard type

XRESO-100


Pattern layout
image2

PAGETOP

High resolution type with thicker absorber

XRESO-50HC


SEM image of chart Pattern layout
Radial patterns
Corresponding to point (1) of the pattern layout
image13
image11
50nm L&S
Corresponding to point (2) of the pattern layout
image12