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X-ray chart (resolution chart)

Ta absorber patterns (highly precise fine patterns with good processability of...

  • Ta absorber patterns (highly precise fine patterns with good processability of Ta)
  • SiN or SiC membrane
  • Three different types according to your needs

Detail

Specifications

Item Standard type
XRESO-100
High resolution type
with thicker Ta
absorber
XRESO-50HC
Substrate Material / Size Si 10mm square Si 10mm square
Thickness 1mm 1mm
Membrane Material /
Thickness
Ru 20nm
SiN 2µm
Ru 20nm
SiC 200nm
SiN 50nm
Area 1mm square 1mm square
Alignment Center of the substrate Center of the substrate
Pattern Absorber /
Thickness
Ta 1µm Ta 500nm
Minimum pattern
size
100nm 50nm
Patterned ares 250µm × 350µm 300µm square

image1
Schematic of X-ray chart (High resolution chart)

PAGETOP

Standard type

XRESO-100


Pattern layout
image2

PAGETOP

High resolution type with thicker absorber

XRESO-50HC


SEM image of chart Pattern layout
Radial patterns
Corresponding to point (1) of the pattern layout
image13
image11
50nm L&S
Corresponding to point (2) of the pattern layout
image12