Evaluation / Measurement

The following evaluation / measurement is available as the inspection after processing. This will be done inside a clean room.

Microscopic observation	Optical microscope, Low acceleration SEM, Laser microscope
Thickness evaluation	Optical film thickness meter, ellipsometer, AFM
Step measuring	Stylus profiler
OPTIONS	Transmittance / Absorption / Reflectance measurement using spectrometer, AFM measurement, Cross-section SEM observation(destructive test)

NTT-AT provides the following Electrical measurement services.

Electrical measurement	I-V measureing, I-L measuring, Sheet resistivity

Laser microscope evaluation

Fractography	Photon microscope Low acceleration SEM(electron microscope) Laser microscopy

Minute difference evaluation by AFM

Film thickness measurement	Optical film thickness meterAFM Eripusometer AFM

Difference evaluation with stylus difference meter

Difference measurement stylus	difference meter

I-V characteristic and I-L evaluation of characteristics (CW) of semiconductor laser

Electrooptics measurement	Current-Voltage (I-V) measurement Current-Optical output (I-L) measurement Seat resistance measurement

Notes :

This content may be subject to change without notice. These stated pattern features and structures are representative and not guaranteed. Actual pattern features and structures are determined by the conditions and make-up of the samples and the required pattern structures, etc.