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Evaluation / Measurement

In-line evaluation

The following evaluation / measurement is available as the inspection after processing. This will be done inside a clean room.

Microscopic observation Optical microscope, Low acceleration SEM, Laser microscope
Thickness evaluation Optical film thickness meter, ellipsometer, AFM
Step measuring Stylus profiler
OPTIONS Transmittance / Absorption / Reflectance measurement using spectrometer, AFM measurement, Cross-section SEM observation(destructive test)

Electrical measurement

NTT-AT provides the following Electrical measurement services.

Electrical measurement I-V measureing, I-L measuring, Sheet resistivity


Examples

Laser microscope evaluation


Laser microscope evaluation
Fractography Photon microscope
Low acceleration SEM(electron microscope)
Laser microscopy

Minute difference evaluation by AFM


Minute difference evaluation by AFM
Film thickness measurement Optical film thickness meterAFM
Eripusometer
AFM

Difference evaluation with stylus difference meter


Difference evaluation with stylus difference meter
Difference measurement stylus difference meter

I-V characteristic and I-L evaluation of characteristics (CW) of semiconductor laser


I-V characteristic and I-L evaluation of characteristics (CW) of semiconductor laser
Electrooptics measurement Current-Voltage (I-V) measurement
Current-Optical output (I-L) measurement
Seat resistance measurement



Notes : This content may be subject to change without notice.
These stated pattern features and structures are representative and not guaranteed.
Actual pattern features and structures are determined by the conditions and make-up of the samples and the required pattern structures, etc.

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