Evaluation / Measurement

NTT-AT provides the following Evaluation / Measurement services in our clean room (In-line evaluation). We also provide more evaluation items as Off-line evaluation. Please feel free to consult with us about them more in details.

Microscopic observation	Low acceleration SEM, Optical microscope, Laser microscope
Film thickness measurement	Optical film thickness meter, Ellipsometer
Step measurement	Stylus profiler
OPTIONS	Transmittance / Absorption / Reflectance measurement using spectrometer, AFM measurement, Cross-section SEM observation(destructive test)

NTT-AT provides the following Electrical measurement services.

Electrical measurement	I-V characteristics, C-V characteristics, Sheet resistance measurement

Notes :

This content may be subject to change without notice. These stated pattern features and structures are representative and not guaranteed. Actual pattern features and structures are determined by the conditions and make-up of the samples and the required pattern structures, etc.