Evaluation / Measurement

The following evaluation / measurement is available as the inspection after processing. This will be done inside a clean room.

Microscopic observation	Optical microscope, Low acceleration SEM, Laser microscope
Thickness evaluation	Optical film thickness meter, ellipsometer, AFM
Step measuring	Stylus profiler
OPTIONS	Transmittance / Absorption / Reflectance measurement using spectrometer, AFM measurement, Cross-section SEM observation(destructive test)

NTT-AT provides the following Electrical measurement services.

Electrical measurement	I-V measureing, I-L measuring, Sheet resistivity

Notes :

This content may be subject to change without notice. These stated pattern features and structures are representative and not guaranteed. Actual pattern features and structures are determined by the conditions and make-up of the samples and the required pattern structures, etc.