Evaluation / Measurement
In-line evaluation
The following evaluation / measurement is available as the inspection after processing. This will be done inside a clean room.
| Microscopic observation | Optical microscope, Low acceleration SEM, Laser microscope |
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| Thickness evaluation | Optical film thickness meter, ellipsometer, AFM |
| Step measuring | Stylus profiler |
| OPTIONS | Transmittance / Absorption / Reflectance measurement using spectrometer, AFM measurement, Cross-section SEM observation(destructive test) |
Electrical measurement
NTT-AT provides the following Electrical measurement services.
| Electrical measurement | I-V measureing, I-L measuring, Sheet resistivity |
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| Notes : | This content may be subject to change without notice. These stated pattern features and structures are representative and not guaranteed. Actual pattern features and structures are determined by the conditions and make-up of the samples and the required pattern structures, etc. |
