Membrane MEMS
- Fabricate a high sensitive sensor on the membranes for heat, vibration, light, charged ion particle, etc
Features
- Experienced fabrication knowledge of membranes cultivated through x-ray mask and EB mask fabrication
- Precisely controlled membrane surface for low stress during fabrication
- Optically transparent membranes
* Membrane MEMS is MEMS (Micro Electro Mechanical System) using ultra thin film structure
Material
| Membrane material | SiC, SiN |
|---|---|
| Type of metals for patterning | Ta, Au, Pt, Cr |
Application example < Membrane MEMS sensor >
Category
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