"Custom-made" templates for Nanoimprint
- Variety of template materials :
Quartz, Silicon (Si), Silicon Carbide (SiC), Glassy Carbon (GC), Nickel (Ni), Tantalum (Ta)
UV nano-imprinting
Quartz template
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Thermal nano-imprinting
Si template
- Suitable for fabricating ultra fine patterns (around 30nm patterns)
- Various pattern structures using crystal orientation
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SiC template
- Good durability against heat and chemical products
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Glassy Carbon (GC)
- Excellent durability against heat
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Nickel template (Ni)
- Widely used for the template material for injection molding
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Tantalum template (Ta)
- Excellent metal for nano-order patterning and heat durability
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Typical specifications
| * | Please feel free to contact us for "custom-made" templates according to your needs. |
| Substrate | Quartz, Si, SiO2/Si, SiN/Si, CVD-SiC/Si, CVD-SiC/SiC ceramic, Single crystal SiC, Ni electroforming, Ta |
| Substrate size | Able to dice out the substrate according to your needs |
| Minimum pattern feature | 20nm |
| Maximum patterned area | About 50mm square |
| (Please feel free to contact us for further details regarding the specifications as they will vary depending on template material, pattern size, pattern depth and so on.) |
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