Transmission filters for the extreme ultraviolet

• The filter removes the unrequired wavelengths from the extreme ultraviolet.
• It is applied to irradiated EUV light, laser plasma X-ray, etc.

This is a transmission filter utilizing the absorption edge of a substance.
It is made of a single or multiple layers of inorganic lamellae fabricated on a transmitting support base.
For example, thin polymer films or metal meshes with an inorganic lamella, such as a metal film, fabricated on them are available.



We fabricate an inorganic lamella of your choice on the support base.
A thin polymer film can itself form a transmission filter for the extreme ultraviolet with a wavelength of 4 to 6 nm.
This film can also be used to prevent debris of laser plasma X-ray.