Scale for step height measuring (Standard type scale)
- Suitable for AFM, optical microscope, stylus method step height scale, etc.
- Three types of steps : 0.05µm, 1µm, 4µm
- Reasonable price with fast delivery
| * | "Custom-made" scale is available for step height which is 4µm or larger. |
Specifications
| Model Type | HS-05 | HS-10 | HS-40 | ||||
|---|---|---|---|---|---|---|---|
| Nominal step | 50nm | 1µm | 4µm | ||||
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| Step area | 100µ × 1mm × 3 lines | ||||||
| Step chip material | Silicon | ||||||
| Step chip thickness | 525µm | ||||||
| Step chip size | 10mm × 10mm | ||||||
| Support substrate | 3mm thickness glass, 30mm × 50mm
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| Step height scale image | |
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| Cross section | Pattern layout |
 Step height 1µm |
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* Please note that the specifications may be subject to change without any prior notice
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