SiC membrane, SiN membrane
SiC membrane, SiN membrane
- Suitable for high-sensitive sensor or MEMS for flow rate and heat control
- Sample holder for SEM and TEM
Specifications
| Membrane material | SiC (conductive), SiN (insulating) |
|---|---|
| Base plate material | 3inch or 4inch Si (able to dice out to the required size) |
| Membrane thickness | several 100nm ~ several µm |
| Membrane stress | Able to control stress according to your requirements |
* Small quantity order is welcome, please feel free to contact us anytime.
Fabrication example
 |
 |
| SiN membrane | |
SiC, SiN membrane chip < Standard product >
- Low stress
- Low cost (especially, SiN membrane)
- Excellent durability and conductivity (SiC)
- Reasonable price and fast delivery term
Specifications
| Model | Chip Size(mm) |
Membrane Material |
Membrane Thickness(nm) |
Membrane Size(mm) |
Frame Thickness(mm) |
| Sin membrane | |||||
|---|---|---|---|---|---|
| ATN/MEM-N03001/7.5M | 7.5 × 7.5 | SiN | 100 | 3 × 3 | 0.625 |
| ATN/MEM-N02001/10M | 10 × 10 | SiN | 100 | 2 × 2 | 0.625 |
| ATN/MEM-N03002/7.5M | 7.5 × 7.5 | SiN | 200 | 3 × 3 | 0.625 |
| ATN/MEM-N03002/10M | 10 × 10 | SiN | 200 | 3 × 3 | 0.625 |
| ATN/MEM-N020027/10M | 10 × 10 | SiN | 270 | 2 × 2 | 0.625 |
| ATN/MEM-N0302/10M | 10 × 10 | SiN | 2,000 | 3 × 3 | 0.625 |
| ATN/MEM-N0302/10M | 10 × 10 | SiN | 1,000 | 3 × 3 | 0.625 |
| SiC membrane | |||||
| ATN/MEM-C02003/10M | 10 × 10 | SiC | 300 | 2 × 2 | 0.625 |
| ATN/MEM-C03003/10M | 10 × 10 | SiC | 300 | 3 × 3 | 0.625 |
| ATN/MEM-C0301/10M | 10 × 10 | SiC | 1,000 | 3 × 3 | 0.625 |
Schematic of membrane chip
* Please note that the specifications may be subject to change without any prior notice.
Category
Environmental Assessment Fiber Optics Semiconductor Nanofabrication Products X-Ray / EUV optics and system Material Analysis RF & Wireless Telecommunication network Audio/Visual Technology transfer serviceInquiry
Product inquiries