Multilayer mirrors for extreme ultra-violet used for spectroscoping, image forming and reflection

1. Large mirror (diameter: 200 mm)
2. High reflective multilayer mirror
3. Highly heat-resistant mirror
4. Short-spacing mirror (Minimum: 1.0 nm)
5. Mirror with spherical or aspheric surface
6. Development of new EUV focusing optics

Example of setting up mirrors

Heavy element layer

Au, Ag, Cr, Co, Cu, Fe, Mn, Mo, Nb, Ni, Pd, Pt, Re, Rh, Ru, Sn, Ti, V, W, Zn, Cr₃C₂, Co-Cr, Ni-Cr, Mo-Ru, Rh-Ru, MoSi₂, Mo₅Si₃, etc.

Light element layer

Al, AlN, B, B₄C, BN, C, LiF, Sc, Si, SiC, SiN, SiO₂, SnO₂, Ta₂O₅, TiN, TiO₂, etc.

Substrate material

Quartz, Si, SiC, zero dewer, polyimide film, etc.

Shape of substrate surface

Flat, convex, concave, spherical, aspheric, cylindrical, etc.

Example of composition