nm-scales for nm-beam size measurement
|Feature|
Feature
- Measurement of nm-size beams, such as electron beams, ion beams, and X-rays, is now possible
- The beam-width can be measured in units of nm.
- Measurement in both one and two dimensions is possible.
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 References: K.Kurihara,K.Iwadate,H.Namatsu, M.Nagase,H.Takenaka and K.Murase, "An Electron Beam Nanolithography System and its Application to Si Nanofabrication", Jpn.J.Appl.Phys.,34(1995)6940 |
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