Optical Resolution Test Chart
Advantages
- Various patterns such as L&S, Pin holes, radial patterns and etc.
- Minimum pattern size: 0.1µm
- Ta patterns on Quartz substrate, Ta has high resistivity against heat and acid
- Able to use with transmitted light as well as reflected light
Specifications
| Model | ATN/OMRESO-100 |
|---|---|
| Substrate | Quartz, 0.625mmt |
| Chip size | 10mm square |
| Patterned area material and thickness | Ta 200nmt |
| For resolutions | Pin holes (A, B, C, D): 4 levels |
| Alighnment mark | 1.5mm square cross pattern (4 marks) *Width of the cross mark is 2µm |
| ID pattern | "F" pattern |
Evaluating resolution
- Able to evaluate resolution at different angles simultaneously with L&S and radial patterns
- Minimum pattern size is 0.1µm
Evaluating distortion
- Pin hole diameter is 1, 2, 5 and 10µm
- Alighment of 1:5 (Pin hole diameter : width)expanded radially
- Able to evaluate distortion at each magnification
| Remarks : | Please kindly note that the specifications and numbers stated in this brochure are approximate values and not guranteed. Also the specifications may change without prior notice due to the updates. |
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