Standard Sample for Height Calibration of AFM Instruments with the Order of Sub-Nanometer

It is well known that the step structure on silicon surfaces can be controlled by a heating process in an ultrahigh vacuum. The height of the Si(111) monoatomic step is 0.31 nm and is determined crystallographically.
Anyone can use this standard sample to calibrate the height scale of an AFM instrument or estimate the instrument's perfomance.

Note :

This standard sample is one of the registered products of "Reference materials total information services of Japan" of Incorporated Administrative Agency National Institute of Technology and Evaluation, Japan. http://www.rminfo.nite.go.jp/rminfo/en/detailA360000001.do

The 10mm × 10mm sample can be applied to any AFM instrument. The sample is carefully packaged for delivery to prevent it from coming into contact with anything. With appropriate precautions to guard against humidity and floating particles in the air, the surface structure is good for more than 6 months.

Uses

• Height scale calibration
• Estimation of instrument's performance

Please see the Journal of Vacuum Science & Technology A14, 1228(1996) for information about height calibration using the stepped silicon surface. You should also contact the respective manufacturers for information how to calibrate your AFM instrument.

A stepped structure like that in the figure on the left can be easily observed. The height of each step is 0.31 nm. The heating process is well controlled so that the number of crossing points of the steps and the number of SiC particles is as small as possible.

Specifications of AFM Height Calibration Standard Sample

Name:	Standard sample for height scale calibration of AFM instruments
Item No.:	S-AFM-1
Material:	Si(111) substrate about 10 steps per 1µm or 10µm
Size:	10mm × 10mm × substrate thickness Another size is applicable after prearrangement
Effective area:	Central part measuring 6 mm × 6mm
Attached data:	An AFM observation result for a 1µm × 1µm area
Warranty period:	6 months after delivery. Please be sure to keep the sample in a desiccator etc. where the humidity is kept as low as possible by using a flow of inert gas or desiccant. We also recommend that dust on the sample be removed by blowing using an inert gas. We cannot guarantee the surface quality when the sample surface is degraded by AFM observation conditions or rinsed using organic solvent or water.
Time of delivery:	Within 2 weeks for orders under five units. (in Japan) Please contact us if you need six or more samples.

(Note)

The database of registered "Reference materials total information services of Japan" can be found in the following web site. http://www.rminfo.nite.go.jp/english/index.html