Standard sample for in-depth profiling
|Feature|
Feature
This is a standard test sample of a multilayer film laminated with a heterogeneous-substance layer at a certain distance and of a certain thickness.
This helps in-depth profiling of AES, SIMS, XPS and XRF.

This helps in-depth profiling of AES, SIMS, XPS and XRF.
Example of standard sample for in-depth profiling
Using this standard sample, you can test
- in-depth resolution,
- in-depth distance, and
- sensitivity.
Example of standard sample for AES profiling

Example layout of standard sample for AES profiling


Example result of AES in-depth profiling

