Scale for metrology (Standard type scale)
- Suitable for calibration of length and angle of scanning probe essential for ultra fine pattern evaluation.
- Reasonable price with short delivery
| * | "Custom-made" scale is available for ultra fine patterns with the pitch of 100nm or smaller. |
Specifications
| Type | Vertical type (AS100P-D) |
Taperde type (AS200P-A) |
|---|---|---|
| Application | Length calibration, probe structure evaluation | Angle calibration |
| Features |
|
|
| Angle | 90 degree | 54.74 degree |
| Pattern type | 1:1 L&S (Outside of the patterned area is concave) |
|
| Line width (Convex area) |
50 ~ 250 nm | 100 ~ 400 nm |
| Pattern depth | 125 nm±20% | 100 ~ 200 nm (as is) |
| Patternde area | 200µ × 200µ | 180µ × 184µ × 4 (types) |
| Substrate | Si 10mm × 10mm × 0.525mmt | Si 10mm × 10mm × 0.525mmt |
* Please note that the specifications may be subject to change without any prior notice.
Vertical type AS100P-D
| SEM observation image |
|---|
 |
| Cross section of 100nm pitch L&S |
Taperde type AS200P-A
| AFM observation image (Unit : Horizontal direction : µm, Vertical direction : nm) |
|
|---|---|
 |
 |
| 400nm pitch L&S pattern | 800nm pitch grid pattern |
Example of Custom-made scale
(e.x. vertical type with 50nm pitch)
| TEM observation image |
|---|
 |
| Cross section of 50nm pitch L&S |
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