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Stencil products

  • Ultra fine stencil patterns (through-hole) on thin membranes

Typical specifications

Pattern size > 80nm ~ several µm
Membrane thickness > 0.1 ~ 2µm
Patterned area ~ several mm square
Membrane material Ta, SiN, SiC
Base plate material Si

* Custom-made specifications are also available, please feel free to contact for further details



Fabrication example

Ta/SiC laminated stencil
Ta thickness : 500nm
SiC thickness : 500nm
image1
SiC stencil
SiC thickness : 500nm
image2
SiN stencil mesh
SiN thickness : 1µm
image3



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