Step Grating
4 to 8 step grating with high accuracy.
Feature
- Step shape grating fabrication
- Nanometer order pattern accuracy
Applications
| Lens | 1D , 2D Fresnel zone plate |
| Beam splitter | Step grating |
| Wavelength filter | Phase shift mark , polarizer |
 4STEP - SiO2patterns (1step height= 0.3µm) |
 6STEP - Si patterns (1step height= 1.2µm) |
Specification
| Pitch | 0.2µm - 500µm |
| Depth | 0.1µm - 3µm |
| Patterned area | squares in several millimeters |
| Materials | Ta , SiO2 / Si , Si , quartz etc |
| Shape | step |
Category
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