Transmission type grating / Pin hole
- Ultra fine patterns on thin membranes (Grating, Pin hole, etc.)
- Variety of line-ups from "standard specifications" to "custom-made specifications"
Transmission type grating < Standard product >
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| Transmission type grating (Ta/SiC Stencil) ATN/TG-200/11W |
Schematic of grating structure |
Specifications
| Pattern / Pitch | 100nm / 200nm |
|---|---|
| Membrane | Ta thickness : 200nm / SiC thickness : 300nm |
| Patterned area | 1mm square |
| Si substrate size | 10mm square |
| Remarks | 2.5µmm pitch / 0.5µm |
* Please note that the specifications may be subject to change without any prior notice.
Pin hole (Custom-made)
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| Pin Hole (Ta / SiC stencil) |
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