V-groove grating (Blazed grating)
- Fabricate V-groove with Sub µm ~ several µm depth
- Triangle cross-section with the flat apical region of 50nm or smaller
Specifications
- The following are the typical specifications
- Please feel free to contact us for "custom-made" grating according to your requirements
| Pitch | Sub µm ~ 100µm |
|---|---|
| Depth | Sub µm ~ 100µm |
| Pattern area | 1 ~ 20mm square |
| Material | Si |
| Structure | V groove (first facet angle : 54.7 degree), Please feel free to contact us regarding "Blaze structure" |
Pattern examples
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| V-groove grating (pitch : 1µm) | Cross section of grating (pitch : 1µm) |
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