X-ray Fresnel Zone Plate (FZP)

X-ray absorber pattern of Fresnel Zone Plate (FZP)

<< Pattern image (φ2.5mm) >> (Optical microscope)

<< Observed SEM image with diagonal angle >> (SEM)

Fresnel Zone Plate (FZP) Structure

<< Binary type >>

<< Step (kinoform) type >>

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Rn : Outermost Zone Width,
D : Diameter,
N : Total Zone,
Tm : Ta Thickness

Model	Aspect Ratio	Membrane Material	Membrane Thickness (µm)	ΔRn (nm)	D (um)	N	Tm (nm)
ATN/FZP-S38/84	4.2	SiN	0.15	38	84	550	160
ATN/FZP-S50/80	5	SiN	0.2	50	80	400	250
ATN/FZP-S40/155	5	SiN	2	40	155	970	200
ATN/FZP-S40/400	5	SiN	0.2	40	400	2,500	200
ATN/FZP-S50/330	8	SiN	1	50	330	1,650	400
ATN/FZP-S86/416	8	SiN	2	86	416	1,200	700
ATN/FZP-100/155	8	SiN	2	100	155	388	800
ATN/FZP-116/3000	7.8	SiN	2	116	3,000	6,497	900
ATN/FZP-173/208	5.8	SiN	2	173	208	300	1,000
ATN/FZP-200/206	8	SiN	2	200	206	255	1,600
ATN/FZP-C234/2500	0.6	SiC	0.2	234	2,500	2,670	150

Ultra fine pattern Fresnel Zone Plate (FZP)

Fresnel Zone Plate (FZP) diameter : 250µm, Ta thickness : 125nm,
Outermost zone width : 25nm, Membrane : SiC 2.0µm

<< SEM image of outermost zone area : Zone width 25nm >>

Thicker absorber (Ta) Fresnel Zone Plate (FZP) (high aspect ratio)

Fresnel Zone Plate (FZP) diameter : 100µm, Ta thickness : 2.5µm,
Outermost zone width : 250nm, Membrane : SiN 2.0µm

<< SEM image of outermost zone area : Ta absorber thickness 2.5µm >>

Step (Kinoform) type Fresnel Zone Plate (FZP)

Fresnel Zone Plate (FZP) diameter : 100µm, Ta thickness : 4.0µm,
Outermost zone width : 400nm, Membrane : SiC 2.0µm

<< SEM image of the Fresnel Zone Plate (FZP) center area : Step (Kinoform) type Fresnel Zone Plate (FZP), Ta pattern >>