X-ray Fresnel Zone Plate (FZP)

Suitable for X-ray optical systems such as x-ray microscopy, beam monitoring of synchrotron radiation facility, etc.
High resolution x-ray Fresnel zone plate (minimum zone width down to 35nm)
Variety of zone plate line-ups from "standard specifications" to "custom-make specifications"

Pattern image (φ2.5mm)
(Optical microscope)

Observed SEM image with diagonal angle
(SEM)

Binary type

Step (kinoform) type

Minimum zone width (outer most zone)	35nm
Maximum diameter	5mm
Membrane material	SiN, SiC
Membrane thickness	0.2 ~ 2µm
Absorber material	Ta
Absorber thickness	0.1 ~ 2µm
Si substrate shape	10mm square
Si substrate thickness	1mm

* We are pleased to discuss with you for other requirements.

FZP diameter : 180µm, Ta thickness : 175nm,
Outermost zone width : 35nm, Membrane : SiN 2.0µm

SEM image of outermost zone area : Zone width 35nm

FZP diameter : 100µm, Ta thickness : 2.5µm,
Outermost zone width : 250nm, Membrane : SiN 2.0µm

SEM image of outermost zone area : Ta absorber thickness 2.5µm

FZP diameter : 100µm, Ta thickness : 4.0µm,
Outermost zone width : 400nm, Membrane : SiC 2.0µm

SEM image of the FZP center area : Step (Kinoform) type FZP, Ta pattern

* Please note that the specifications may be subject to change without any prior notice.