X-ray chart (resolution chart)

Specifications

Item		New ! Standard type ATN/XRESO-100	High resolution type ATN/XRESO-50	High resolution type with thicker Ta absorber ATN/XRESO-50HC
Substrate	Material / Size	Si 10mm square	Si 10mm square	Si 10mm square
	Thickness	10mm	1mm
Membrane	Material / Thickness	Ru 20nm SiN 200µm	Ru 20nm SiN 200nm	Ru 20nm SiC 200nm SiN 50nm
	Area	1mm square	1mm square
	Alignment	Center of the substrate	Center of the substrate
Pattern	Absorber / Thickness	Ta 1µm	Ta 200nm	Ta 500nm
	Minimum pattern size	100nm	50nm	50nm
	Patterned ares	250µm × 350µm	300µm square	300µm square

Schematic of X-ray chart (High resolution chart)

Standard type
ATN / XRESO-100 New !

Pattern layout

High resolution type
ATN/XRESO-50

SEM image of chart
100nm hole Corresponding to point (1) of the pattern layout	50nm L&S Corresponding to point (2) of the pattern layout
Radial patterns Corresponding to point (3) of the pattern layout	Radial patterns 50nm area Corresponding to point (3) of the pattern layout
Image with X-ray inspection equipment (TUX-5000F) form Tohken Corporation. ↓↓↓	Pattern layout
Courtesy of Tohken Corporation

High resolution type with thicker absorber
ATN/XRESO-50HC

SEM image of chart	Pattern layout
Radial patterns Corresponding to point (1) of the pattern layout
50nm L&S Corresponding to point (2) of the pattern layout