EUV Test Patterns
EUV Test Patterns
Image of EUV Test Patterns

Customized Reflective EUV Test Patterns


  • Reflective type.
  • Fine patterns: lines and spaces, down to less than 80 nm. Other customized test patterns are designed.
  • “Gap” and “Bridge” marks in the lines are available.



  • Flexible design enables higher performance with lower cost.
  • Lines and spaces pattern of 50 nm or less is under development. In limited conditions, samples of the pattern resolusion may be available.

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