EUV Test Patterns
EUV Test Patterns
Image of EUV Test Patterns

Customized Reflective EUV Test Patterns

Features

  • Reflective type.
  • Fine patterns: lines and spaces, down to less than 80 nm. Other customized test patterns are designed.
  • “Gap” and “Bridge” marks in the lines are available.

EUV_testpatterns_design.JPG

EUV_testpatterns_SEM.JPG

  • Flexible design enables higher performance with lower cost.
  • Lines and spaces pattern of 50 nm or less is under development. In limited conditions, samples of the pattern resolusion may be available.
     

Product Inquiry

Share on Twitter Share on Facebook