Low-Noise MEMS Accelerometer
Low-Noise MEMS Accelerometer

MEMS Accelerometer Device with An Ultra-Low Noise of 300 nG/√Hz Is Realized.


Innovative structure,*1 capacitive sensor using a multi-layer gold proof-mass, tremendously suppresses the noises of the whole device.*2

*1 T. Konishi et al., Jpn. J. Appl. Phys., Vol. 52, No. 6S, 06GL04 (2013).
*2 D. Yamane et al., App. Phys. Letters, Vol. 104, Issue 7, 074102 (2014).

Capacitive MEMS Accelerometer

Sensor Chip's technical information is shown below. We also provide sensor modules and packages on customers' requests.


  • Detection range: +/-0.5G, +/-2G, +/-4G, +/-16G
  • MEMS sensor device chip size: < 4 mm x 4 mm x 0.6 mm
  • MEMS sensor device noise density: < 300 nG/√Hz

To be applied to

  • Medical: Human body motion monitoring
  • Factories/plants/transportations: Oscillation monitoring of plants and machines for early failure detections
  • Infrastructures: Critical structures like bridges, tunnels and railroads
  • Aerospace: Satellites, airplanes, and others

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