
Custom designable XUV, EUV, and X-ray mirrors, only NTT-AT in the world
EUV mirrors/X-ray mirrors Inquiry
Benefits
NTT-AT has been supplying high-quality XUV, EUV, and X-ray mirrors for more than 20 years. In particular, backed by its extensive experience and outstanding skills, it provides custom-designable multi-layer film mirrors adapted to meet individual customer requirements.

Features
Research institutes around the world have continued to choose NTT-AT's multi-layer mirrors because of their quality. Multi-layer materials and structure are customized to meet your detailed specifications, such as substrate, peak wavelength, bandwidth, and dispersion. High heat-durability multi-layer mirrors are also supported. A reflectivity evaluation service using synchrotron facilities is also available as an option.
Application example |
Coating materials |
Typical wavelength |
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XUV (EUV) mirror |
EUV lithography
High-order harmonics applications
Attosecond science X-ray laser |
Multi-layer mirror |
Mo/Si Ru/Si Zr/Al SiC/Mg Cr/C |
50 eV ~100 eV 50 eV~100 eV 50 eV ~ 70 eV 25 eV ~50 eV ~300 eV |
Single layer mirror |
SiC Pt Ru |
10 eV ~ 100 eV | ||
X-ray mirror |
Synchrotron applications XFEL applications Built into X-ray non-destructive inspection devices |
Multi-layer mirror |
W/C W/B4C Ru/C Pt/C |
1 keV ~ 30 keV |
Single layer mirror |
C B4C SiC Cr Ni |
1 keV ~ 30 keV |
EUV mirrors/X-ray mirrors Inquiry
XUV multi-layer mirrors(EUV multi-layer mirrors)
Substrate shape: plane, convex, concave, paraboloid, Toroidal surface, ellipsoidSubstrate materials: Quartz, Silicon, Zerodewer, etc.
Coating materials::Mo/Si, Ru/Si, Zr/Al, SiC/Mg, Cr/C etc.
Substrate size :φ3 mm~φ300 mm
NTT-AT will provide high-durability XUV multi-layer mirrors, highly heat-resistant XUV multi-layer film mirrors as well as optical systems, such as Schwarzschild optical systems and pump probe optical systems.
Product example
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Φ10mm plane mirror |
Measured reflectivities of Mo/Si multi-layers (normal incident angle: 2 degrees) |
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Multi-layer mirror for pump probe test |
Measured relectivities of broadband mirrors, narrow band mirror(wavelength :30 nm) |
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Mo/Si multi-layer mirrors have a high reflectivity near the wavelength of 13 nm (90 eV). NTT-AT’s Mo/Si multi-layer mirrors have a reflectivity of up to 70% for normal incidence. The materials, film structure, and substrate shape of NTT-AT’s XUV mirrors can be customized to suit your needs regarding central wavelength and optical arrangements. |
EUV broadband ellipsoidal mirror (Φ100 mm Zerodewer) |
X-ray multi-layer mirrors
Substrate figure: plane, ellipsoid, paraboloid, cylindrical surface, toroidal surfaceSubstrate: Quartz, Silicon, Zerodewer, etc.
Coating materials: W/B4C, W/C, Pt/C etc.
Substrate size: Max 500 mm
NTT-AT provides K-B mirror system, Walter mirror etc.
Product example
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W/B4C multi-layer and W/C multi-layer film mirrors have high reflectivity for hard X-ray applications. To reflect and concentrate a hard X-ray efficiently, it is necessary to minimize the oblique angle of incidence. This requires a long mirror length and a small multi-layer film cycle length. |
Multi-layer mirror for K-B mirror system |
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The materials, film structure, and substrate shape of NTT-AT’s X-ray mirrors can be customized to suit your needs regarding central wavelength, bandwidth and optical arrangements. |
Evaluated reflectivity (wavelength: 0.154 nm, Blue: measured reflectivity, Pink: calculated reflectivity, periodic length: 2.95 nm) |
Single layer mirrors
Substrate figure: plane ,ellipsoid ,Paraboloid ,cylindrical surface ,toroidal surfaceSubstrate materials: Quartz, Silicon, Zerodewer, etc.
Coating materials: C, B4C, SiC, Ru, NbN, Pt, etc.
Substrate size: Max 500 mm
NTT-AT provides K-B mirror system, Walter mirror, etc.
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Single layer mirrors, which use total reflection, are used for beam steering, light concentration and removal of unneeded wavelengths in the XUV to X-ray range. The materials and substrate shape of NTT-AT’s single layer mirrors can be customized to suit your needs regarding central wavelength and optical arrangements. |
Ellipsoidal mirror with Ru layer |
EUV mirrors/X-ray mirrors Inquiry
Papers &Publications
White paper
Multilayer mirror | Download |
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Related Products
Multilayer Designs | Link Page |
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Toroidal Mirror | Link Page | |
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XUV Dichroic Mirror | Link Page | |
EUV Half mirror | Link Page |
Multilayer Polarizer | Link Page | |
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Design and fabrication of EUV/X-ray focusing systems | Link Page |