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nm-scales for nm-beam size measurement

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  • We have made it possible to measure the fine beam sizes of electron beams, ion beams, and X-rays.
  • nm units.Beam width can be measured in
  • For 1D and 2D measurementare available.

 

(a) Scale structure and (b) transmitted electron beam intensity
(a) Scale structure and
(b) Transmitted electron beam intensity
Electronic movie size measurement examplef
Example of measuring electron beam size
 
References:
K.Kurihara,K.Iwadate,H.Namatsu,
M.Nagase,H.Takenaka and K.Murase,
"An Electron Beam Nanolithography System and its Application to Si Nanofabrication",
Jpn.J.Appl.Phys.,34(1995)6940

 

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