Silicon Photonics
We will provide Si waveguides such as compact optical circuit, etc., depending on the customers' required design.
Advantages of NTT-AT’s Si Photonics Foundry Services
Flexibly customized Si waveguide for each customer’s requirements
- Ultra fine optical circuit achieved by the advanced nano fabrication techniques
Si waveguide circuit with low connection loss
- Spot-size converter achieving low connection loss between optical fiber and Si waveguide enables customers to evaluate the optical circuit performance precisely
Various optional services available
- Ta heater to control optical characteristics precisely
- Integration with polymer and other types of functional materials
One-stop full range of services
- From fabrication to optical characterization as well as mounting/packaging with fiber connection
Typical Si waveguide circuit design
Fabrication example
| Waveguide core | 400-500nm width x 220nm height |
|---|---|
| Ring resonator gap | >150nm |
| Waveguide area | typically 5x5mm |
| Spot-size converter core | 3umx3um |
| Gap between spot-size converters | >50um |
| Chip size (if dicing requested) | typically 15x5.6mm |
Low connection loss based on Spot-size converter
-Typical loss: 1.5dB/connection
Structure of Spot-size converter
Fiber array connection with Si chip
Fiber array connection with Si chip
Schematic of Fiber array connection
Schematic of fiber array connection
Other value added process services
- Ta heater for precise control of optical refractive index
- Hybrid combination of Si chip and functional materials such as polarization material
- Mounting structure of Laser diode chip
Ultra compact size Ta heater for precise temperature control
Applications
Functional circuits such as Optical switching, Wavelength filter
| Requirement |
|
Precise control of Optical characteristics with localized heater |
| Solutions |
|
1 Ta (high-melting point metal) thin layer 2 Ultra compact size heater using nano-fabrication technique 3 Locally heating by combining the low resistive Au wire |
Example of Ta heater pattern fabricated on over-cladding layer
Cross sectional veiw of a Micro heater
Ta heater pattern example
SEM image: Ta heater pattern close-up(Fig.1)
Application
Application
Introducing functional materials
Applications
Sensing devices, Ge optical detector, modulator
| Requirement |
|
Hybrid combination of Si chip and other functional materials |
| Solutions: Over-cladding layer using functional materials |
|
1 Partial expose of Si waveguide available 2 Damage free dry etching and wet etching process |
Fabrication example
Mounting of Laser diode chip based on high precision fabrication technique
