Silicon/Silicon Dioxide Microscopic Scale
High-Precision Silicon/Silicon Dioxide Scale of Sub-10 nm Resolution Pattern
AFM tip inspection (example)
External image of micrpscopic scale
- Best for calibration and inspection of TEM, AFM and other microscopes used in the semiconductor industry.
- Durable and no contaminations
- Sub-10 nm resolution and high aspect ratio. *
* For each batch of products, a test piece is inspected by TEM. The scale lengths of the pattern are measured with reference to the silicon atomic steps as a standard. The inspection data is attached to products.