Feature
Diffraction grating SEM image
We offer transmission-type diffraction photons with a stencil structure that provide high diffraction efficiency even in the VUV region, EUV region, and soft X-ray region, where material absorption is large.
It can be used for high-order harmonic spectroscopy experiments, inspection/evaluation elements in the EUV region, X-ray plasma spectroscopy, etc. In addition to standard one-dimensional grids, we also offer custom-made products according to customer requests.
It can be used for high-order harmonic spectroscopy experiments, inspection/evaluation elements in the EUV region, X-ray plasma spectroscopy, etc. In addition to standard one-dimensional grids, we also offer custom-made products according to customer requests.
Design example
Diffraction efficiency of Ta/SiN double-layer grating
Diffraction efficiency of SiN grating
Standard product specifications
| structure | Ta/SiN 2-layer type | SiN type |
|---|---|---|
| Diffraction grating size | 2 mm x 2 mm | |
| Number of lines | 100 line/mm - 2400 line/mm | |
| beam | 500 nm width, 50 µm pitch (perpendicular to the grating) | |
| diffraction grating material | Ta (100 nm) / SiN (100 nm) | SiN (100 nm) |
| chips | 10 mm x 10 mm x 0.625 mm thick, Si | |
Configuration of transmission grating. (a) Si frame, (b) transmission grating
Please contact us
Please feel free to contact us for inquiries such as an estimate.
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