XUV/EUV X-ray Optics

NTT-AT has developed and sold many kinds of optical elements to manipulate X-rays and extreme ultraviolet for a long time. They have acquired a high-level reputation for their design and production technologies that have been cultivated by co-development with many researchers of synchrotron radiation science, attosecond science, and ultra-intense physics in the world. The Fresnel zone plate provided by NTT-AT has been used in synchrotron radiation facilities because of its high focusing efficiency and high x-ray irradiation durability. The resolution evaluation chart is recognized as the de facto standard and used not only in academic field but also in development sites of X-ray inspection machine. XUV multilayer mirror and XUV filter support leading-edge attosecond science and are applied to next generation lithography research. NTT-AT, providing not only elements but also optical systems, is the best partner for customers who engage in research and development in the XUV, EUV, and X-ray fields.

EUV mirrors/X-ray mirrors

Custom designable XUV, EUV, and X-ray mirrors, only NTT-AT in the world

X ray filter

  Outer shape:15mm x10mm x 0.6mmt  　　　　　　　Membrane size: 3mm x 0.3mm ...

UV Focusing Lens

UV Focusing Relay Lens, essential component for UV and VUV photo-electron spectroscopy applications....

Toroidal mirrors

Custom designable Toroidal mirrors for world wide customer

XUV Dichroic Mirrors

Durable XUV Dichroic Mirrors working in broad spectral ranges

EUV Half mirror

EUV half mirrors, only from NTT-AT

X-ray grating

NTT-AT's high-contrast and high-sharpness X-ray gratings are optimized for x-ray Talbot imaging.

Multilayer Polarizer

In XUV and soft x-ray region, Brewster angle of multilayer materials are around 45 degrees, thus, ...

XUV Transmission Grating

Compact design and straight forward alignment.
Ideal for HHG (high harmonic generation) spectro...

EUV Test Patterns

Customized Reflective EUV Test Patterns

X-ray chart

The de facto standard of resolution evaluation charts for X-ray analysis.

X-ray Fresnel Zone Plate (FZP)

SiC membrane-based FZP, only from NTT-AT in the world

Design and fabrication of EUV/X-ray focusing systems

A wide variety of EUV (extreme ultraviolet light) and X-ray optics systems according to your operati...